Lyshevski S. - Nano and Microelectromechanical Systems.pdf

(8335 KB) Pobierz
NANO- AND MICROELECTROMECHANICAL SYSTEMS
NANO- AND
MICROELECTROMECHANICAL
SYSTEMS
Fundamentals of
Nano- and Microengineering
A book in the
Nano- and Microscience, Engineering,
Technology and Medicine Series
NANO- AND
MICROELECTROMECHANICAL
SYSTEMS
Fundamentals of
Nano- and Microengineering
Sergey Edward Lyshevski
CRC Press
Boca Raton London New York Washington, D.C.
Library of Congress Cataloging-in-Publication Data
Lyshevski, Sergey Edward.
Nano- and microelectromechanical systems : fundamentals of nano- and
microengineering / Sergey Edward Lyshevski.
p. cm. -- (Nano- and microscience, engineering, technology, and medicine series)
Includes index.
Includes bibliographical references and index.
ISBN 0-8493-916-6 (alk. paper)
1. Microelectromechanical systems. 1. Title. II. Series.
TK7875 .L96 2000
621.381—dc201
00-057953
CIP
This book contains information obtained from authentic and highly regarded sources. Reprinted material
is quoted with permission, and sources are indicated. A wide variety of references are listed. Reasonable
efforts have been made to publish reliable data and information, but the author and the publisher cannot
assume responsibility for the validity of all materials or for the consequences of their use.
Neither this book nor any part may be reproduced or transmitted in any form or by any means, electronic
or mechanical, including photocopying, microfilming, and recording, or by any information storage or
retrieval system, without prior permission in writing from the publisher.
The consent of CRC Press LLC does not extend to copying for general distribution, for promotion, for cre-
ating new works, or for resale. Specific permission must be obtained in writing from CRC Press LLC for
such copying.
Direct all inquiries to CRC Press LLC, 2000 N.W. Corporate Blvd., Boca Raton, Florida 33431.
Product or corporate names may be trademarks or registered trademarks, and are
used only for identification and explanation, without intent to infringe.
© 2001 by CRC Press LLC
No claim to original U.S. Government works
International Standard Book Number 0-8493-916-6
Library of Congress Card Number 00-057953
Printed in the United States of America 1234567890
Printed on acid-free paper
Trademark Notice:
To my family

Plik z chomika:

Inne pliki z tego folderu:

Inne foldery tego chomika:

Zgłoś jeśli naruszono regulamin