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HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
M icrorobotics, Microtelemanipulation
and Microassembly
Introduction to Microsystems Technology
Lecture N-1
Quan Zhou
Outline
Microrobotics
Microtelemanipulation
Microassembly
Table of Contents, Slide 2
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
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Definitions
Robot
Ö Word robot was coined by the Czech playwright Karel Capek in his play
Rossum's Universal Robots in 1920’s, robota = forced labor, worker
Ö “A reprogrammable, multifunctional manipulator designed to move
material, parts, tools, or specialized devices through various programmed
motions for the performance of a variety of tasks”, Robot Institute of
America , 1979
Industrial robots vs. service robots
Table of Contents, Slide 3
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
Definitions ...
Microrobot
Ö reprogrammable behavior (as in industrial robots) or
Ö adaptivity to unpredicted circumstances (as in advanced robots for
unstructured environments, service robots) or
Ö remote controllability (as in teleoperated robots)
Basically the only difference between a macro and microrobot is the
scale of the application domain
Microbots extend human capabilities to the microscale
Table of Contents, Slide 4
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
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Classification
With regard to size/capabilities
Ö “miniature robots”
Ö “microrobots”
Ö “nanorobots”
Functional classification
Ö fixed / mobile
Ö energy source on-board / not on-board
Ö wires / wireless
Task-specific classification
Table of Contents, Slide 5
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
Classification with regard to size
Miniature robots
Ö size: few cubic centimeters
Ö workspace and forces
comparable to those of fine
human manipulations
Ö fabrication by assembling
conventional miniature
components and micromachines
Ö majority of today’s
microrobots belong to this
class
Table of Contents, Slide 6
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
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Table of Contents, Slide 7
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
Classification with regard to size ...
Microrobots
Ö size: few hundred cubic micrometers
Ö fabricated by means of micromachining technologies (such as bulk or
surface micromachining or LIGA technology)
Ö consists of microactuators, sensors and signal processing circuits
Ö scaling effect should be taken into account when designing actuators, for
example
Ö applications: cell manipulation, assembly
Table of Contents, Slide 8
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
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Classification with regard to size ...
Nanorobots
Ö size: few hundred nanometers to a
couple of micrometers, i.e. same as
the scale of biological cells
Ö conventional mechanical principles
(for driving and manipulation) are not
applicable here but electrochemical
means could be used (mimicking
biological organisms)
Ö solid-state technology is not currently
suitable for nano-scale fabrication but
polymer chemistry techniques can
provide a solution
Table of Contents, Slide 9
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
Functional classification
CU - control unit
Classification criteria
Ö mobility
Ö autonomy
Ö control
(wires)
PS - power supply
AP - actuators for
positioning
AO - actuators for
operation
Table of Contents, Slide 10
HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
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